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2", 4" PSS

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 Product name: 2"PSS/4"PSS

Product introduction: Patterned Sapphire Substrate(“PSS”for short)is manufacturing the pattern with micro-structure on the surface of Sapphire plain film substrate through spin, developing, etching and other processes. Lateral growth technology on the patterned substrate will reduce the defects on epitaxial layer effectively and increase luminous efficiency of LED remarkably.

Application: GaN-based LED, High-power component。

蓝宝石图形化衬底(Patterned Sapphire Substrate, PSS)

Item项目

2"

4"

Crystal晶体

LED Grade Sapphire

LED Grade Sapphire

Sapphire purity蓝宝石纯度

≥99.998%

≥99.998%

Color颜色

Transparent

Transparent

Orientation方向

C plane tiled M axis 0.20°±0.1°

C plane tiled M axis 0.20°±0.1°

Diameter直径

50.8±0.1mm

100±0.2mm

Thickness厚度

430±10μm

650±10μm

Primary Flat Location定位面方向

A-axis ± 0.2°

A-axis ± 0.2°

Flat Length定位面长度

16.0±1.0 mm

30.0 ±1.0 mm

Front side surface抛光面

Epi-ready patterned surface

Epi-ready patterned surface

Back side surface背面

Fine ground; Ra < 1.2 um

Fine ground; Ra < 1.2 um

TTV平坦度

≤ 5.0μm

≤ 10μm

BOW弯曲度

≤ -10μm

≤ -20μm

Pattern diameter图形直径

2.7±0.15 um

2.7±0.15 um

Pattern height图形高度

1.6±0.15 um

1.6±0.15 um

Pattern space图形间距

0.3±0.15 um

0.3±0.15 um

Pattern arrangement

Close-packed arrangement; hexagonal type

Close-packed arrangement; hexagonal type

图形间距

Defective patterns

Total defective area ≦3% of wafer area; Inspection by naked eye added without bright light

Total defective area ≦5% of wafer area; Inspection by naked eye added without bright light

图形缺陷 

Scratch刮伤

Visible to naked eye added without bright light;

Visible to naked eye added without bright light; 

total length < 3mm

total length < 5mm

Package包装

Clean room, vacuum packing

Clean room, vacuum packing


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Address: No.58, Hengguang Road, Economic and Technological Development Zone,Nanjing, Jiangsu Province

Zip code: 210038

E-mail: xsb@j-crystal.com.cn

Tel: 025-85789211
Fax: 025-85789210

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